Datasets:

ClarusC64
/

euv-banding-failure-horizon-and-sync-routing-v0.1

language:
  - en
license: mit
pretty_name: EUV Banding Failure Horizon & Sync Routing v0.1
dataset_name: euv-banding-failure-horizon-and-sync-routing-v0.1
tags:
  - clarusc64
  - euv
  - lithography
  - banding
  - timing
  - routing
task_categories:
  - tabular-to-text
size_categories:
  - 1K<n<10K
configs:
  - config_name: default
    data_files:
      - split: train
        path: data/train.csv
      - split: test
        path: data/test.csv

What this dataset tests

Forecast when banding becomes visible on wafer.

Route the minimal sync intervention.

Banding emerges when:

pulse timing jitter rises
phase alignment error grows
exposure window shrinks
drift rate accelerates

Task

Given telemetry, output JSON:

horizon_min
action
fix_set

Example {"horizon_min":25,"action":"pulse_retime","fix_set":"pulse timing retime; jitter clamp"}

Inputs

pulse_time_jitter_ns
phase_alignment_error_ns
stage_pos_error_nm
exposure_window_ns
drift_rate_ns_per_min

Context

residual_banding_metric
banding_risk_score
yield_risk

Allowed actions

monitor
pulse_retime
stage_phase_correction
servo_rebalance
source_recalibrate
latency_trim
jitter_clamp
halt_and_recalibrate

Evaluation

Checks:

valid JSON
has horizon and action
action is in allowed set

Version

v0.1