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- ---
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- license: mit
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- ---
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
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+ ---
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+ language:
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+ - en
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+ license: mit
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+ pretty_name: EUV Banding Failure Horizon & Sync Routing v0.1
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+ dataset_name: euv-banding-failure-horizon-and-sync-routing-v0.1
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+ tags:
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+ - clarusc64
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+ - euv
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+ - lithography
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+ - banding
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+ - timing
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+ - routing
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+ task_categories:
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+ - tabular-to-text
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+ size_categories:
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+ - 1K<n<10K
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+ configs:
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+ - config_name: default
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+ data_files:
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+ - split: train
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+ path: data/train.csv
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+ - split: test
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+ path: data/test.csv
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+ ---
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+
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+ ## What this dataset tests
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+
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+ Forecast when banding becomes visible on wafer.
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+
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+ Route the minimal sync intervention.
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+
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+ Banding emerges when:
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+
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+ pulse timing jitter rises
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+ phase alignment error grows
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+ exposure window shrinks
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+ drift rate accelerates
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+
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+ ## Task
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+
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+ Given telemetry, output JSON:
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+
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+ - horizon_min
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+ - action
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+ - fix_set
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+
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+ Example
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+ {"horizon_min":25,"action":"pulse_retime","fix_set":"pulse timing retime; jitter clamp"}
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+
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+ ## Inputs
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+
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+ pulse_time_jitter_ns
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+ phase_alignment_error_ns
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+ stage_pos_error_nm
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+ exposure_window_ns
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+ drift_rate_ns_per_min
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+
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+ Context
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+
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+ residual_banding_metric
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+ banding_risk_score
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+ yield_risk
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+
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+ ## Allowed actions
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+
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+ monitor
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+ pulse_retime
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+ stage_phase_correction
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+ servo_rebalance
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+ source_recalibrate
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+ latency_trim
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+ jitter_clamp
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+ halt_and_recalibrate
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+
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+ ## Evaluation
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+
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+ Checks:
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+
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+ valid JSON
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+ has horizon and action
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+ action is in allowed set
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+
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+ ## Version
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+
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+ v0.1