Datasets:
Update README.md
Browse files
README.md
CHANGED
|
@@ -1,3 +1,86 @@
|
|
| 1 |
-
---
|
| 2 |
-
|
| 3 |
-
-
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
| 1 |
+
---
|
| 2 |
+
language:
|
| 3 |
+
- en
|
| 4 |
+
license: mit
|
| 5 |
+
pretty_name: EUV Banding Failure Horizon & Sync Routing v0.1
|
| 6 |
+
dataset_name: euv-banding-failure-horizon-and-sync-routing-v0.1
|
| 7 |
+
tags:
|
| 8 |
+
- clarusc64
|
| 9 |
+
- euv
|
| 10 |
+
- lithography
|
| 11 |
+
- banding
|
| 12 |
+
- timing
|
| 13 |
+
- routing
|
| 14 |
+
task_categories:
|
| 15 |
+
- tabular-to-text
|
| 16 |
+
size_categories:
|
| 17 |
+
- 1K<n<10K
|
| 18 |
+
configs:
|
| 19 |
+
- config_name: default
|
| 20 |
+
data_files:
|
| 21 |
+
- split: train
|
| 22 |
+
path: data/train.csv
|
| 23 |
+
- split: test
|
| 24 |
+
path: data/test.csv
|
| 25 |
+
---
|
| 26 |
+
|
| 27 |
+
## What this dataset tests
|
| 28 |
+
|
| 29 |
+
Forecast when banding becomes visible on wafer.
|
| 30 |
+
|
| 31 |
+
Route the minimal sync intervention.
|
| 32 |
+
|
| 33 |
+
Banding emerges when:
|
| 34 |
+
|
| 35 |
+
pulse timing jitter rises
|
| 36 |
+
phase alignment error grows
|
| 37 |
+
exposure window shrinks
|
| 38 |
+
drift rate accelerates
|
| 39 |
+
|
| 40 |
+
## Task
|
| 41 |
+
|
| 42 |
+
Given telemetry, output JSON:
|
| 43 |
+
|
| 44 |
+
- horizon_min
|
| 45 |
+
- action
|
| 46 |
+
- fix_set
|
| 47 |
+
|
| 48 |
+
Example
|
| 49 |
+
{"horizon_min":25,"action":"pulse_retime","fix_set":"pulse timing retime; jitter clamp"}
|
| 50 |
+
|
| 51 |
+
## Inputs
|
| 52 |
+
|
| 53 |
+
pulse_time_jitter_ns
|
| 54 |
+
phase_alignment_error_ns
|
| 55 |
+
stage_pos_error_nm
|
| 56 |
+
exposure_window_ns
|
| 57 |
+
drift_rate_ns_per_min
|
| 58 |
+
|
| 59 |
+
Context
|
| 60 |
+
|
| 61 |
+
residual_banding_metric
|
| 62 |
+
banding_risk_score
|
| 63 |
+
yield_risk
|
| 64 |
+
|
| 65 |
+
## Allowed actions
|
| 66 |
+
|
| 67 |
+
monitor
|
| 68 |
+
pulse_retime
|
| 69 |
+
stage_phase_correction
|
| 70 |
+
servo_rebalance
|
| 71 |
+
source_recalibrate
|
| 72 |
+
latency_trim
|
| 73 |
+
jitter_clamp
|
| 74 |
+
halt_and_recalibrate
|
| 75 |
+
|
| 76 |
+
## Evaluation
|
| 77 |
+
|
| 78 |
+
Checks:
|
| 79 |
+
|
| 80 |
+
valid JSON
|
| 81 |
+
has horizon and action
|
| 82 |
+
action is in allowed set
|
| 83 |
+
|
| 84 |
+
## Version
|
| 85 |
+
|
| 86 |
+
v0.1
|