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Datasets:
ClarusC64
/
euv-stochastic-source-resist-coherence-baseline-mapping-v0.1
like
0
Tasks:
Tabular to Text
Languages:
English
Size:
1K<n<10K
Tags:
clarusc64
euv
lithography
stochastic
resist
photon-noise
+ 1
License:
mit
Dataset card
Data Studio
Files
Files and versions
xet
Community
main
euv-stochastic-source-resist-coherence-baseline-mapping-v0.1
/
data
1.46 kB
1 contributor
History:
2 commits
ClarusC64
Create data/test.csv
d9403ec
verified
6 months ago
test.csv
Safe
395 Bytes
Create data/test.csv
6 months ago
train.csv
Safe
1.06 kB
Create data/train.csv
6 months ago
