| id,case_title,photon_flux_mean_w,photon_flux_cv,source_pulse_energy_cv,resist_sensitivity_mj_cm2,acid_diffusion_length_nm,blur_length_nm,ler_sigma_nm,stochastic_defect_rate_ppm,coherence_score,stochastic_risk_band,notes |
| SSR-001,Healthy baseline,250,0.012,0.010,22,12,8,1.8,2,0.95,low,Stable coupling |
| SSR-002,Healthy high power,280,0.013,0.011,22,12,8,1.9,3,0.94,low,Still coherent |
| SSR-003,Slight photon noise,250,0.020,0.016,22,12,8,2.1,6,0.90,low,Noise rising |
| SSR-004,Slight resist drift,250,0.012,0.010,24,13,9,2.3,8,0.88,low,Sensitivity drift |
| SSR-005,Coupling softening,250,0.022,0.018,24,13,10,2.6,14,0.82,medium,Tails growing |
| SSR-006,Resist blur increase,250,0.018,0.015,26,14,11,2.9,22,0.74,medium,Blur dominates |
| SSR-007,Source jitter increase,250,0.030,0.026,22,12,9,2.7,26,0.70,medium,Jitter dominates |
| SSR-008,Emergent stochasticity,250,0.034,0.030,26,14,12,3.4,45,0.58,high,Nonlinear defect rise |
| SSR-009,High defect regime,250,0.040,0.034,28,15,13,4.0,70,0.46,high,Yield risk |
| SSR-010,Collapse edge,250,0.048,0.040,30,16,14,4.8,110,0.30,high,Near failure |
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