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Datasets:
ClarusC64
/
euv-stage-sync-drift-and-phase-lag-precursor-detection-v0.1

Tasks:
Tabular Classification
Languages:
English
Size:
1K<n<10K
Tags:
clarusc64
euv
lithography
stage
sync
precursor
License:
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The dataset generation failed because of a cast error
Error code:   DatasetGenerationCastError
Exception:    DatasetGenerationCastError
Message:      An error occurred while generating the dataset

All the data files must have the same columns, but at some point there are 1 new columns ({'constraints'})

This happened while the csv dataset builder was generating data using

hf://datasets/ClarusC64/euv-stage-sync-drift-and-phase-lag-precursor-detection-v0.1/data/test.csv (at revision c685079bd1291a9d1a264597c9ae492e80839a15), [/tmp/hf-datasets-cache/medium/datasets/88921426117451-config-parquet-and-info-ClarusC64-euv-stage-sync--6881c025/hub/datasets--ClarusC64--euv-stage-sync-drift-and-phase-lag-precursor-detection-v0.1/snapshots/c685079bd1291a9d1a264597c9ae492e80839a15/data/test.csv (origin=hf://datasets/ClarusC64/euv-stage-sync-drift-and-phase-lag-precursor-detection-v0.1@c685079bd1291a9d1a264597c9ae492e80839a15/data/test.csv)]

Please either edit the data files to have matching columns, or separate them into different configurations (see docs at https://hf.co/docs/hub/datasets-manual-configuration#multiple-configurations)
Traceback:    Traceback (most recent call last):
                File "/usr/local/lib/python3.12/site-packages/datasets/builder.py", line 1887, in _prepare_split_single
                  writer.write_table(table)
                File "/usr/local/lib/python3.12/site-packages/datasets/arrow_writer.py", line 675, in write_table
                  pa_table = table_cast(pa_table, self._schema)
                             ^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^
                File "/usr/local/lib/python3.12/site-packages/datasets/table.py", line 2272, in table_cast
                  return cast_table_to_schema(table, schema)
                         ^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^
                File "/usr/local/lib/python3.12/site-packages/datasets/table.py", line 2218, in cast_table_to_schema
                  raise CastError(
              datasets.table.CastError: Couldn't cast
              id: string
              case_title: string
              reticle_pos_error_nm: double
              wafer_pos_error_nm: double
              residual_sync_error_nm: double
              phase_lag_ms: double
              phase_lag_drift_ms_per_min: double
              control_loop_latency_ms: double
              euv_pulse_jitter_ns: int64
              scan_velocity_mms: int64
              scan_accel_mms2: int64
              precursor_flag: double
              notes: string
              constraints: string
              -- schema metadata --
              pandas: '{"index_columns": [{"kind": "range", "name": null, "start": 0, "' + 2085
              to
              {'id': Value('string'), 'case_title': Value('string'), 'reticle_pos_error_nm': Value('float64'), 'wafer_pos_error_nm': Value('float64'), 'residual_sync_error_nm': Value('float64'), 'phase_lag_ms': Value('float64'), 'phase_lag_drift_ms_per_min': Value('float64'), 'control_loop_latency_ms': Value('float64'), 'euv_pulse_jitter_ns': Value('int64'), 'scan_velocity_mms': Value('int64'), 'scan_accel_mms2': Value('int64'), 'precursor_flag': Value('int64'), 'notes': Value('string')}
              because column names don't match
              
              During handling of the above exception, another exception occurred:
              
              Traceback (most recent call last):
                File "/src/services/worker/src/worker/job_runners/config/parquet_and_info.py", line 1347, in compute_config_parquet_and_info_response
                  parquet_operations = convert_to_parquet(builder)
                                       ^^^^^^^^^^^^^^^^^^^^^^^^^^^
                File "/src/services/worker/src/worker/job_runners/config/parquet_and_info.py", line 980, in convert_to_parquet
                  builder.download_and_prepare(
                File "/usr/local/lib/python3.12/site-packages/datasets/builder.py", line 884, in download_and_prepare
                  self._download_and_prepare(
                File "/usr/local/lib/python3.12/site-packages/datasets/builder.py", line 947, in _download_and_prepare
                  self._prepare_split(split_generator, **prepare_split_kwargs)
                File "/usr/local/lib/python3.12/site-packages/datasets/builder.py", line 1736, in _prepare_split
                  for job_id, done, content in self._prepare_split_single(
                                               ^^^^^^^^^^^^^^^^^^^^^^^^^^^
                File "/usr/local/lib/python3.12/site-packages/datasets/builder.py", line 1889, in _prepare_split_single
                  raise DatasetGenerationCastError.from_cast_error(
              datasets.exceptions.DatasetGenerationCastError: An error occurred while generating the dataset
              
              All the data files must have the same columns, but at some point there are 1 new columns ({'constraints'})
              
              This happened while the csv dataset builder was generating data using
              
              hf://datasets/ClarusC64/euv-stage-sync-drift-and-phase-lag-precursor-detection-v0.1/data/test.csv (at revision c685079bd1291a9d1a264597c9ae492e80839a15), [/tmp/hf-datasets-cache/medium/datasets/88921426117451-config-parquet-and-info-ClarusC64-euv-stage-sync--6881c025/hub/datasets--ClarusC64--euv-stage-sync-drift-and-phase-lag-precursor-detection-v0.1/snapshots/c685079bd1291a9d1a264597c9ae492e80839a15/data/test.csv (origin=hf://datasets/ClarusC64/euv-stage-sync-drift-and-phase-lag-precursor-detection-v0.1@c685079bd1291a9d1a264597c9ae492e80839a15/data/test.csv)]
              
              Please either edit the data files to have matching columns, or separate them into different configurations (see docs at https://hf.co/docs/hub/datasets-manual-configuration#multiple-configurations)

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id
string
case_title
string
reticle_pos_error_nm
float64
wafer_pos_error_nm
float64
residual_sync_error_nm
float64
phase_lag_ms
float64
phase_lag_drift_ms_per_min
float64
control_loop_latency_ms
float64
euv_pulse_jitter_ns
int64
scan_velocity_mms
int64
scan_accel_mms2
int64
precursor_flag
int64
notes
string
SYNC-PRE-001
Nominal baseline
1
1.2
0.7
0.16
0.002
1.2
24
520
2,100
0
Stable
SYNC-PRE-002
Low drift
1.2
1.4
0.9
0.19
0.004
1.3
26
540
2,150
0
Within band
SYNC-PRE-003
Drift onset mild
1.4
1.7
1.3
0.25
0.01
1.4
30
580
2,250
1
Phase lag trend
SYNC-PRE-004
Latency creep
1.6
1.9
1.7
0.31
0.015
1.6
33
600
2,350
1
Loop lag
SYNC-PRE-005
Jitter coupling
1.9
2.2
2.3
0.39
0.02
1.7
36
620
2,450
1
Precursor
SYNC-PRE-006
Vibration load
2.2
2.6
3
0.48
0.028
1.8
40
640
2,550
1
Escalating
SYNC-PRE-007
Servo instability edge
2.6
3
3.9
0.6
0.04
2
46
660
2,650
1
High risk
SYNC-PRE-008
Near halt zone
3.1
3.6
5.1
0.75
0.055
2.2
52
680
2,750
1
Failure near
SYNC-PRE-009
Recovered transient
1.8
2.1
1.9
0.33
0.006
1.5
34
600
2,300
0
Recovered
SYNC-PRE-010
High speed stable
1.3
1.6
1.2
0.24
0.003
1.3
28
610
2,400
0
Stable

Purpose

Detect early synchronization failure precursors between reticle and wafer stages.

Failure is preceded by:

phase lag drift
residual sync error growth
latency increase
timing jitter coupling

Task

Predict:

precursor_flag

0 = stable
1 = precursor to sync failure

Inputs

reticle_pos_error_nm
wafer_pos_error_nm
phase_lag_ms
phase_lag_drift_ms_per_min
control_loop_latency_ms
euv_pulse_jitter_ns
scan_velocity_mms
scan_accel_mms2

Output

Return one value:

0 or 1

Evaluation

Binary match scoring.

Version

v0.1
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