Datasets:
Update README.md
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README.md
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---
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language:
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- en
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license: mit
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pretty_name: EUV Stochastic Source–Resist Coherence Baseline Mapping v0.1
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dataset_name: euv-stochastic-source-resist-coherence-baseline-mapping-v0.1
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tags:
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- clarusc64
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- euv
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- lithography
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- stochastic
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- resist
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- photon-noise
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- yield
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task_categories:
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- tabular-to-text
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size_categories:
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- 1K<n<10K
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configs:
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- config_name: default
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data_files:
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- split: train
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path: data/train.csv
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- split: test
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path: data/test.csv
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---
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## What this dataset tests
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Stochastic defect emergence is not random.
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It rises when coherence decays between:
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photon noise
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pulse stability
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resist chemistry response
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line edge roughness
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defect rate
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This dataset maps the healthy coupling first.
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## Task
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Predict:
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coherence_score 0..1
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risk_band low or medium or high
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Return JSON
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{"coherence_score":0.74,"risk_band":"medium"}
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## Inputs
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photon_flux_mean_w
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photon_flux_cv
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source_pulse_energy_cv
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resist_sensitivity_mj_cm2
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acid_diffusion_length_nm
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blur_length_nm
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ler_sigma_nm
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stochastic_defect_rate_ppm
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## Why it matters
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Stochastic failures kill yield quietly.
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They appear as rare bridges and missing contacts.
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By the time yield alarms trigger, the window is gone.
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## Version
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v0.1
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