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- ---
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- license: mit
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- ---
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
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+ ---
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+ language:
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+ - en
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+ license: mit
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+ pretty_name: EUV Stochastic Source–Resist Coherence Baseline Mapping v0.1
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+ dataset_name: euv-stochastic-source-resist-coherence-baseline-mapping-v0.1
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+ tags:
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+ - clarusc64
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+ - euv
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+ - lithography
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+ - stochastic
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+ - resist
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+ - photon-noise
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+ - yield
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+ task_categories:
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+ - tabular-to-text
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+ size_categories:
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+ - 1K<n<10K
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+ configs:
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+ - config_name: default
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+ data_files:
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+ - split: train
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+ path: data/train.csv
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+ - split: test
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+ path: data/test.csv
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+ ---
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+
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+ ## What this dataset tests
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+
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+ Stochastic defect emergence is not random.
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+
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+ It rises when coherence decays between:
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+
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+ photon noise
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+ pulse stability
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+ resist chemistry response
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+ line edge roughness
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+ defect rate
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+
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+ This dataset maps the healthy coupling first.
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+
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+ ## Task
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+
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+ Predict:
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+
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+ coherence_score 0..1
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+ risk_band low or medium or high
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+
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+ Return JSON
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+
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+ {"coherence_score":0.74,"risk_band":"medium"}
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+
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+ ## Inputs
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+
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+ photon_flux_mean_w
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+ photon_flux_cv
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+ source_pulse_energy_cv
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+
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+ resist_sensitivity_mj_cm2
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+ acid_diffusion_length_nm
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+ blur_length_nm
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+
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+ ler_sigma_nm
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+ stochastic_defect_rate_ppm
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+
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+ ## Why it matters
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+
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+ Stochastic failures kill yield quietly.
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+
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+ They appear as rare bridges and missing contacts.
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+
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+ By the time yield alarms trigger, the window is gone.
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+
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+ ## Version
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+
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+ v0.1